Recycled Parts Moderator Newsgroup, Discussion Board and Trading Place > Buy back Centers
> Metal
> Aluminum
> Tcu 40/80 temperature control unit
Tcu 40/80 temperature control unit
The TCU 40/80 is designed to meet the stringent semiconductor requirements for the cooling of wafers during the etch or other semiconductor processes. The TCU 40/80 is designed for reliability, up-time performance and ease of maintenance, providing continuous trouble free operation across wide temperature extremes. This, combined with Edwards worldwide service hubs and on-site service support, makes the Edwards TCU 40/80 the new industry standard.
* Wide operating temperature -40 to +80°C
* Temperature set at 0.1°C increments
* Temperature stability ±1.0°C typical
* Adjustable coolant flow 1-6 gpm
* Fuzzy logic temperature control
* CE marked; low voltage directive compliant
* Magnetically driven coolant pump for leak free, reliable operation
* Perfluorinert coolant for ion free operation
* Remote temperature sensing capability
* Stainless steel pressurized coolant system
* MTBF of >40,000 hours, 90% confidence level, guaranteed
