Recycled Parts Moderator Newsgroup, Discussion Board and Trading Place > Recycling Codes
> Metal
> Aluminum
> Lam research A4 alliance 4520XL TCP9400SE 200MM
Lam research A4 alliance 4520XL TCP9400SE 200MM
Lam Research Corporation A4 Alliance
with TCP9400 SE and 4520XL Process Modules
Operational Status Operational
System Power Rating 208 VAC 3-Phase
Loading Configuration Dual VCE Loader
Pump Stack BOC Edwards Q-Controller w/ iQDP80 and QMB250
RF Power Rack ENI Genesis GEW2527MA-B1C00-L1 Rev E2,
Turbo Pump Controller Osaka TC440
Electrical Distribution Cabinet
Process Modules 4520XL, TCP9400SE, can accommodate up to 4 PMs
4520XL Module Dual Frequency Advanced Oxide RIE (Reactive Ion Etch)
Process pressure 30 - 150mtorr
Chamber and wafer area manometers
TCP9400SE Polysilicon Etch, Low Density, High Pressure Planar Plasma Source
Heated Chamber and Vacuum Hardware
Heated Chamber Manometer – 100mtorr
Seiko Seki Turbomolecular Pump
Description Chemicals / Gases Used
Chamber Position 1 2 Loadlock ports at atmosphere & Vac
Chamber Position 2 Transfer module N2
Chamber Position 3 Process chamber 1 O2 N2 HE CL2 HBr Freon
Chamber Position 4 Process chamber 2 O2 C4F8 Freon CO Freon23-Argon
